Stealth dicing with ultrafast Bessel beams with engineered transverse profiles

6533b82efe1ef96bd1293d5c

RESEARCH PRODUCT

Stealth dicing with ultrafast Bessel beams with engineered transverse profiles

Jassem Safioui Remi Meyer Luca Furfaro R. Giust John M. Dudley François Courvoisier Pierre-ambroise Lacourt

subject

010302 applied physics [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics]Materials science Scanning electron microscope business.industry Laser cutting 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences 7. Clean energy Intensity (physics)symbols.namesake Transverse plane Optics 0103 physical sciences symbols Physics::Accelerator Physics Wafer dicing 0210 nano-technology business Ultrashort pulse Bessel function Laser beams

description

International audience; We investigate high-speed glass cleaving with ultrafast laser beams with engineered transverse intensity profile. We achieve accuracy of ~ 1 µm at 25 mm/s and drastically enhance cleavability compared to standard Bessel beams.

year	journal	country	edition	language
2017-06-25

https://hal.archives-ouvertes.fr/hal-02300658

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