Heavy ion induced Ti X-ray satellite structure for Ti, TiN, and TiO2 thin films

6533b85bfe1ef96bd12ba204

RESEARCH PRODUCT

Heavy ion induced Ti X-ray satellite structure for Ti, TiN, and TiO2 thin films

M. R. J. Palosaari Marko Käyhkö Timo Sajavaara Ilari Maasilta Kai Arstila Mikko Laitinen

subject

Materials science biology ta114 Analytical chemistry X-ray 02 engineering and technology 021001 nanoscience & nanotechnology biology.organism_classification 01 natural sciences spectrometry spektrometria titaani thin films 0103 physical sciences Heavy ion Satellite (biology)titanium Thin film ohutkalvot 010306 general physics 0210 nano-technology Spectroscopy

year	journal	country	edition	language
2018-09-14	X-ray Spectrometry

10.1002/xrs.2976 https://doi.org/10.1002/xrs.2976

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