Search results for " interfaces"

showing 10 items of 1158 documents

Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors

2014

In this paper, we report ALD deposition of silicon dioxide using either thermal or plasma enhanced atomic layer deposition (PEALD). Several aminosilanes with differing structures and reactivity were used as silicon precursors in R&D single wafer ALD tools. One of the precursors was also tested on pilot scale batch ALD using O3 as oxidant and with substrates measuring 150 × 400 mm. The SiO2 film deposition rate was greatly dependent on the precursors used, highest values being 1.5-2.0 Å/cycle at 30-200°C for one precursor with an O2 plasma. According to time-of-flight-elastic recoil detection analysis measurements carbon and nitrogen impurities were relatively low, but hydrogen content i…

Materials scienceSiliconSilicon dioxideta221Conformal coatingAnalytical chemistrychemistry.chemical_elementchemistry.chemical_compoundAtomic layer depositionMaterials ChemistryAtomic layer epitaxySilicon dioxideta318Thin filmta216ta116Plasma processingplasma-enhanced atomic layer depositionPlasma-enhanced atomic layer depositionsilicon dioxideconformal coatingta213ta114Atomic layer depositionbatch depositionIon platingMetals and AlloysPrecursorsSurfaces and InterfacesSurfaces Coatings and FilmsElectronic Optical and Magnetic Materialschemistryatomic layer depositionprecursorsBatch depositionDeposition (chemistry)
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Photoconductivity and optical properties of silicon coated by thin TiO2 film in situ doped by Au nanoparticles

2013

Light trapping enhancement by plasmonic-active metal nanoparticles (NPs) is believed to be a promising approach to increase silicon-based solar cell efficiency. Therefore, we investigated TiO2 films in situ doped by Au NPs (TiO2:AuNPs) deposited by spin coating on a silicon substrate. Photoconductivity and optical properties of the TiO2:AuNPs/Si structures were studied in comparison with those of TiO2/Si reference samples. We found that an introduction of the 40–50 nm diameter AuNPs into the antireflective TiO2 layer deteriorates the antireflection properties and decreases the external yield of photogeneration of charge carriers. This is due to an increase of the layer reflection in the red…

Materials scienceSiliconchemistry.chemical_element02 engineering and technologySubstrate (electronics)7. Clean energy01 natural scienceslaw.inventionOpticslaw0103 physical sciencesMaterials ChemistryElectrical and Electronic Engineering010302 applied physicsSpin coatingbusiness.industryPhotoconductivityDopingSurfaces and Interfaces021001 nanoscience & nanotechnologyCondensed Matter PhysicsSurfaces Coatings and FilmsElectronic Optical and Magnetic MaterialsSolar cell efficiencyAnti-reflective coatingchemistryOptoelectronicsCharge carrier0210 nano-technologybusinessphysica status solidi (a)
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Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties

2017

Atomic layer deposition (ALD) is based on self-limiting surface reactions. This and cyclic process enable the growth of conformal thin films with precise thickness control and sharp interfaces. A multilayered thin film, which is nanolaminate, can be grown using ALD with tuneable electrical and optical properties to be exploited, for example, in the microelectromechanical systems. In this work, the tunability of the residual stress, adhesion, and mechanical properties of the ALD nanolaminates composed of aluminum oxide (Al2O3) and titanium dioxide (TiO2) films on silicon were explored as a function of growth temperature (110-300 C), film thickness (20-300 nm), bilayer thickness (0.1-100 nm),…

Materials scienceSiliconta221chemistry.chemical_elementNanotechnologyresidual stress02 engineering and technology01 natural sciencesStress (mechanics)chemistry.chemical_compoundAtomic layer depositioncontact modulusResidual stress0103 physical sciencesnanolaminatesThin filmComposite materialalumiinita216010302 applied physicsNanocompositeta114BilayeraluminiumSurfaces and Interfacesatomikerroskasvatus021001 nanoscience & nanotechnologyCondensed Matter PhysicshardnessSurfaces Coatings and FilmsadhesionnanolaminatechemistryAtomic Layer DepositionALDTitanium dioxide0210 nano-technologyJournal of Vacuum Science and Technology A
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Interfacial reaction during MOCVD growth revealed by in situ ARXPS.

2006

International audience; Angle-resolved X-ray photoelectron spectroscopy (ARXPS) experiments were performed to study in situ the reaction at the film–substrate interface during metal organic chemical vapor deposition (MOCVD) growth of TiO2 thin films deposited on the silicon substrate. The in-depth distribution of chemical species was determined using several ARXPS thickness calculation models considering either single or bilayer systems. By the comparison of two single-layermodels, the presence of a second layer composed of silicon oxidewas evidenced. High-resolution transmission electron microscopy (HRTEM) observations confirmed the stratification of the film in two layers, as well as the …

Materials scienceSiliconthickness measurementthin filmAnalytical chemistrychemistry.chemical_elementARXPS02 engineering and technologyChemical vapor deposition01 natural sciencesX-ray photoelectron spectroscopy0103 physical sciencesMaterials ChemistryTiO2Thin filmSilicon oxideHigh-resolution transmission electron microscopy010302 applied physicsBilayer[CHIM.MATE]Chemical Sciences/Material chemistrySurfaces and InterfacesGeneral Chemistry021001 nanoscience & nanotechnologyCondensed Matter PhysicsSurfaces Coatings and Filmschemistry[ CHIM.MATE ] Chemical Sciences/Material chemistryMOCVDinterfaceWetting0210 nano-technology
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Poly(3,4-Ethylenedioxythiophene) nanoparticles as building blocks for hybrid thermoelectric flexible films

2019

Hybrid thermoelectric flexible films based on poly(3,4-ethylenedioxythiophene) (PEDOT) nanoparticles and carbon nanotubes were prepared by using layer-by-layer (LbL) assembly. The employed PEDOT nanoparticles were synthesized by oxidative miniemulsion polymerization by using iron(III) p-toluenesulfonate hexahydrate (FeTos) as an oxidant and poly(diallyldimethylammonium chloride) (PDADMAC) as stabilizer. Sodium deoxycholate (DOC) was used as a stabilizer to prepare the aqueous dispersions of the carbon nanotubes. Hybrid thermoelectric films were finally prepared with different monomer/oxidant molar ratios and different types of carbon nanotubes, aiming to maximize the power factor (PF). The …

Materials scienceSolucions polimèriquesminiemulsionNanoparticle02 engineering and technologyCarbon nanotubepedot010402 general chemistry01 natural sciencesthermoelectricitylaw.inventionchemistry.chemical_compoundVan der Pauw methodPEDOT:PSSlawSeebeck coefficientThermoelectric effectMaterials ChemistryPEDOTcarbon nanotubeselectrical conductivityhybrid materialSurfaces and InterfacesConductivitat elèctricaCiència dels materials021001 nanoscience & nanotechnology0104 chemical sciencesSurfaces Coatings and FilmschemistryChemical engineeringlcsh:TA1-2040nanoparticleslcsh:Engineering (General). Civil engineering (General)0210 nano-technologyHybrid materiallayer-by-layer assemblyPoly(34-ethylenedioxythiophene)
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Preparation of Heusler thin films: The quaternary alloy CO2Fe0.5Mn0.5Si

2008

In this work the basic strategies for the preparation of CO2Mn0.5Fe0.5Si as an example for Heusler alloy thin films will be described. Texture and magnetic properties of these films will be discussed, especially with regard to different buffer layers and annealing temperatures. Finally, we will show the integration of Heusler thin films into magnetic tunnel junctions (MTJs) and calculate the effective spin polarization. (c) 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

Materials scienceSpin polarizationCondensed matter physicsAnnealing (metallurgy)MetallurgyAlloyIron alloysSurfaces and Interfacesengineering.materialCondensed Matter PhysicsSurfaces Coatings and FilmsElectronic Optical and Magnetic MaterialsTunnel junctionMaterials ChemistryengineeringQuaternary alloyCathode sputteringElectrical and Electronic EngineeringThin film
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Influence of alkylphosphonic acid grafting on the electronic and magnetic properties of La2/3Sr1/3MnO3 surfaces

2015

Self-assembled monolayers (SAMs) are highly promising materials for molecular engineering of electronic and spintronics devices thanks to their surface functionalization properties. In this direction, alkylphosphonic acids have been used to functionalize the most common ferromagnetic electrode in organic spintronics: La2/3Sr1/3MnO3 (LSMO). However, a study on the influence of SAMs grafting on LSMO electronic and magnetic properties is still missing. In this letter, we probe the influence of alkylphosphonic acids-based SAMs on the electronic and magnetic properties of the LSMO surface using different spectroscopies. We observe by X-ray photoemission and X-ray absorption that the grafting of …

Materials scienceSpintronicsMagnetismMagnetismGeneral Physics and AstronomyNanotechnologySelf-assembled monolayerSelf-assembled monolayersSurfaces and InterfacesGeneral ChemistrySpintronicsCondensed Matter PhysicsSurfaces Coatings and FilmsFerromagnetismMonolayerSurface modificationWork functionUltraviolet photoelectron spectroscopy
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Graphene‐SiO2 Interaction from Composites to Doping

2019

An overview of the interaction between monolayer graphene and SiO2 dielectric substrate is reported focusing on the effect this latter has on doping and strain induced by thermal treatments in controlled atmosphere. The disentanglement of strain and doping is highlighted and the comparison with another dielectric substrate of Al2O3 evidences the critical role that the substrate has in the electronic properties of graphene. The reported results pave the way for microelectronic devices based on graphene on dielectrics and for Fermi level tuning in composites of graphene and nanoparticles.

Materials scienceStrain (chemistry)GraphenegrapheneDopingdopingSurfaces and InterfacesCondensed Matter PhysicsSurfaces Coatings and FilmsElectronic Optical and Magnetic Materialslaw.inventionstrainsilicalawgraphene dopingMaterials ChemistryElectrical and Electronic EngineeringComposite material
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MgO surface microstructure and crystalline coherence of Co/Pt superlattices

1998

We report the growth of Co/Pt(111) superlattices sputtered onto MgO(111) substrates of different surface quality. Long-range structural coherence in the Pt-seed layers and the superlattices could only be obtained on specially re-polished substrates. In seed layers and superlattices grown on miscut re-polished substrates suppression of abc versus acb stacking was observed.

Materials scienceSuperlatticeMetals and AlloysStackingPolishingchemistry.chemical_elementSurfaces and InterfacesMicrostructureSurfaces Coatings and FilmsElectronic Optical and Magnetic MaterialsCrystallographychemistryTransition metalMaterials ChemistryThin filmPlatinumCobaltThin Solid Films
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Strain relaxation, extended defects and doping effects in InxGa1-xN/GaN heterostructures investigated by surface photovoltage

2020

Abstract We have analysed electrical properties of extended defects and interfaces in fully strained and partially relaxed InxGa1-xN/GaN heterostructures by means of Kelvin probe force microscopy and surface photovoltage spectroscopy. The study highlights the role of indium incorporation and Si doping levels on the charge state of extended defects including threading dislocations, V defects and misfit dislocations. Surface potential maps reveal that these defects are associated with a different local work function and thus could remarkably alter electron-hole recombination mechanisms of InxGa1-xN/GaN layers locally. Surface photovoltage spectra clearly demonstrate the role of misfit disloca…

Materials scienceSurface photovoltageGeneral Physics and Astronomychemistry.chemical_element02 engineering and technology010402 general chemistryKelvin probe force microscopy01 natural sciencesSurface photovoltage spectroscopyWork functionSpectroscopyKelvin probe force microscopeCondensed matter physicsInxGa1-xN/GaN heterostructureRelaxation (NMR)DopingHeterojunctionSurfaces and InterfacesGeneral Chemistry021001 nanoscience & nanotechnologyCondensed Matter Physics0104 chemical sciencesSurfaces Coatings and Filmschemistry0210 nano-technologyIndium
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