Search results for "MAGNETRON"

showing 10 items of 39 documents

Understanding the Conversion Process of Magnetron-Deposited Thin Films of Amorphous ReO$_x$ to Crystalline ReO$_3$ upon Thermal Annealing

2020

Crystal growth & design 20(9), 6147 - 6156 (2020). doi:10.1021/acs.cgd.0c00848

Materials scienceAnnealing (metallurgy)thin filmXASchemistry.chemical_elementconductive AFMMetalchemistry.chemical_compoundRhenium trioxide:NATURAL SCIENCES:Physics [Research Subject Categories]opticalXPSReO3General Materials ScienceThin filmmagnetron sputteringGeneral ChemistryRheniumSputter depositionCondensed Matter Physics540Amorphous solidresistivitychemistryChemical engineeringvisual_artddc:540Cavity magnetronSEMvisual_art.visual_art_medium
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Influence of Ag, Cu dopants on the second and third harmonic response of ZnO films

2009

International audience; Silver- and copper-doped ZnO films were prepared by radio-frequency (RF)-magnetron sputtering on glass and quartz substrates. The influence of dopants content on the microstructural evolution and optical as well as nonlinear optical (NLO) properties were investigated. It has been found that the grain sizes were enlarged with increasing of Ag, Cu dopants amount in ZnO films. The Ag or Cu doping leads to the optical band gap narrowing. Besides, the second-order NLO response of Ag- and Cu-doped ZnO films is lower than that of undoped ZnO film. The second harmonic generation (SHG) efficiency of the ZnO:Ag film was found to be higher than that of the ZnO:Cu film at the si…

Materials scienceBand gapSilver-doped ZnO film Copper-doped ZnO film RF-magnetron sputtering SHG THG[SDV]Life Sciences [q-bio]Analytical chemistryMineralogy02 engineering and technology01 natural sciencesSHGTHGCopper-doped ZnO filmSputtering0103 physical sciencesMaterials Chemistry010302 applied physicsDopantMechanical EngineeringDopingMetals and AlloysNonlinear opticsSecond-harmonic generation021001 nanoscience & nanotechnologyMicrostructureGrain sizeMechanics of MaterialsSilver-doped ZnO filmRF-magnetron sputtering0210 nano-technology
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Electrochemical Fabrication and Physicochemical Characterization of Metal/High-k Insulating Oxide/Polymer/Electrolyte Junctions

2014

Photoelectrochemical polymerization of poly(3,4-ethylenedioxythiophene), PEDOT, was successfully realized on anodic film grown to 50 V on magnetron sputtered Ti-6 atom % Si alloys. Scanning electron microscopy allowed us to evidence formation of compact and uniform polymer layers on the oxide surface. Photoelectrochemical and impedance measurements showed that photopolymerization allows one to grow PEDOT in its conducting state, while a strong cathodic polarization is necessary to bring the polymer in its p-type semiconducting state. Information on the optical and electrical properties of metal/oxide/polymer/electrolyte junctions proves that PEDOT has promising performance as an electrolyte…

Materials scienceFabricationElectrochemical fabricationInorganic chemistryImpedance measurementOxidePhysico-chemical characterizationPoly-3 4-ethylenedioxythiopheneElectrolyteElectrochemistrySettore ING-INF/01 - ElettronicaPhotoelectrochemistrychemistry.chemical_compoundPEDOT:PSSPhysical and Theoretical ChemistryConducting statechemistry.chemical_classificationPhotopolymerizationCathodic polarizationPolymerSilicon alloySurfaces Coatings and FilmsElectronic Optical and Magnetic MaterialsOptical and electrical propertieSettore ING-IND/23 - Chimica Fisica ApplicataGeneral EnergychemistryPolymerizationCavity magnetronLithium IntercalationTitanium alloyScanning electron microscopyThe Journal of Physical Chemistry C
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In-situ electrochemical atomic force microscopy study of aging of magnetron sputtered Pt-Co nanoalloy thin films during accelerated degradation test

2016

Abstract A Pt-Co nanoalloy thin film catalyst was prepared by using simultaneous magnetron sputtering of Pt and Co. The catalyst was characterized during accelerated degradation test using in-situ electrochemical atomic force microscopy complemented with ex-situ techniques such as energy dispersive X-ray spectroscopy, X-ray photoelectron spectroscopy and synchrotron radiation photoelectron spectroscopy. The combined results gave the full step-by-step picture of the catalyst behavior during the aging test.

Materials scienceGeneral Chemical EngineeringAnalytical chemistry02 engineering and technologySputter deposition010402 general chemistry021001 nanoscience & nanotechnologyElectrochemistry01 natural sciences0104 chemical sciencesCatalysisX-ray photoelectron spectroscopyCavity magnetronElectrochemistryThin filmCyclic voltammetry0210 nano-technologySpectroscopyElectrochimica Acta
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Characterization and Electrochemical Properties of Oxygenated Amorphous Carbon (a-C) Films

2016

Amorphous carbon (a-C) films with varying oxygen content were deposited by closed-field unbalanced magnetron sputtering with the aim to understand the effect of oxygen on the structural and physical properties of the films and subsequently correlate these changes with electrochemical properties. The a-C films were characterized by transmission electron microscopy, helium-ion microscopy, atomic force microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy and time-of-flight elastic recoil detection analysis. The electrochemical properties were studied by electrochemical impedance spectroscopy and cyclic voltammetry with several redox systems (Ru(NH3)62+/3+, Fe(CN)64−/3−, dopamine an…

Materials scienceGeneral Chemical EngineeringInorganic chemistryAnalytical chemistrychemistry.chemical_element02 engineering and technology010402 general chemistry01 natural sciencesOxygenRedoxunbalanced magnetron sputteringElectrochemistryoxygenated amorphous carbonta114ta213021001 nanoscience & nanotechnologyAscorbic acidelectron transfercyclic voltammetry0104 chemical sciencesAmorphous solidDielectric spectroscopyCarbon filmelectrochemical impedance spectroscopyAmorphous carbonchemistryCyclic voltammetry0210 nano-technologyElectrochimica Acta
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Structural characterization of mixed Ta–Re oxide films

2006

Thin films of mixed Ta and Re oxides have been produced by reactive dc magnetron co-sputtering of pure Ta and Re metal targets in Ar–O2 atmosphere. The structural evolution of these films has been studied as a function of the composition, starting from a pure tantalum oxide film up to about 82% rhenium content. The composition and the structure of the films have been investigated by using X-ray diffraction and micro-Raman spectroscopy. For low Re content (20%), islands of a well crystallized phase, based on ReO4 groups, appear in the films still composed by pure amorphous tantalum oxide, while a mixed disordered solid phase is found for the highest Re concentration (82%). © 2006 Elsevier B.…

Materials scienceInorganic chemistryOxideAnalytical chemistrychemistry.chemical_elementGeneral ChemistryRheniumCondensed Matter PhysicsAmorphous solidMetalchemistry.chemical_compoundsymbols.namesakechemistryvisual_artPhase (matter)Cavity magnetronvisual_art.visual_art_mediumsymbolsGeneral Materials ScienceThin filmRaman spectroscopySolid State Ionics
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Phonon Bridge Effect in Superlattices of Thermoelectric TiNiSn/HfNiSn With Controlled Interface Intermixing

2020

© 2020 by the authors

Materials scienceIntermixingthin filmthermal boundary resistancePhononGeneral Chemical EngineeringSuperlatticeThermal resistanceCoherent phononintermixing02 engineering and technologyHalf-HeuslerHfNiSnThermal boundary resistancethermoelectric01 natural sciencesArticlelcsh:Chemistrycoherent phonon3 omegaThermal conductivityhalf-Heusler0103 physical sciencesThermoelectric effectInterfacial thermal resistancethermal conductivityGeneral Materials ScienceThin filmThin filmSuperlatticeroughness010302 applied physicsmagnetron sputteringCondensed matter physicsThermoelectricsuperlatticeInterface021001 nanoscience & nanotechnologyThermoelectric materialsRoughnessTiNiSnlcsh:QD1-999Thermal conductivityinterface0210 nano-technology3 omega methodMagnetron sputtering
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Structural analysis of W3O/WO3 and TiO/TiO2 periodic multilayer thin films sputter deposited by the reactive gas pulsing process

2012

International audience; DC reactive sputtering was used to deposit titanium and tungsten-based metal/oxide periodic nanometric multilayers using pure metallic targets and Ar + O-2 gas mixture as reactive atmosphere. The innovative technique namely, the reactive gas pulsing process allows switching between the metal and oxide to prepare a periodic multilayered structure with various metalloid concentrations and nanometric dimensions. The same pulsing period was used for each deposition to produce metal-oxide periodic alternations close to 10 nm. Structure, crystallinity and chemical composition of these films were systematically investigated by Raman spectroscopy, X-ray diffraction and Energ…

Materials scienceMAGNETRONInorganic chemistryOxidechemistry.chemical_element02 engineering and technologyTungsten01 natural sciencesTUNGSTEN-OXIDE[SPI.MAT]Engineering Sciences [physics]/Materialschemistry.chemical_compoundSputtering0103 physical sciencesWO3Materials ChemistryNITRIDE[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/MicroelectronicsThin filmHigh-resolution transmission electron microscopy[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph]010302 applied physicsMetals and AlloysSurfaces and InterfacesSputter deposition021001 nanoscience & nanotechnologyPARTIAL-PRESSURE CONTROLSurfaces Coatings and FilmsElectronic Optical and Magnetic MaterialsTitanium oxideEVAPORATIONchemistryChemical engineeringTITANIUM-OXIDEGROWTHARC DEPOSITION0210 nano-technologyDIOXIDETitanium
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A new method of nanocrystalline nickel powder formation by magnetron sputtering on the water-soluble substrates

2018

Due to the accurate and relatively easy control magnetron sputtering is an attractive technique for the synthesis of metallic particles. This work describes a new method of nickel powder production by depositing nickel on the surface of sodium chloride particles which were used as the template and are soluble in water. Ni powder with flake-like structure was obtained after washing Ni coated salt particles in ultrasonic cleaner. Salt particles and nickel powder were characterized using scanning electron microscope (SEM), energy-dispersive x-ray spectrometer, XRD and X-ray photoelectron spectroscopy (XPS) techniques. SEM images showed that thickness of the received Ni particles varied in the …

Materials sciencePolymers and PlasticsScanning electron microscopeMetals and Alloyschemistry.chemical_elementSputter depositionNanocrystalline materialSurfaces Coatings and FilmsElectronic Optical and Magnetic MaterialsBiomaterialsMetalNickelDeposition (aerosol physics)Chemical engineeringchemistryX-ray photoelectron spectroscopyvisual_artCavity magnetronvisual_art.visual_art_mediumMaterials Research Express
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High power impulse magnetron sputtering of Zn/Al target in an Ar and Ar/O2 atmosphere: The study of sputtering process and AZO films

2019

Financial support provided by Scientific Research Project for Students and Young Researchers Nr. SJZ/2017/4 realised at the Institute of Solid State Physics, University of Latvia is greatly acknowledged.

Materials scienceReactive sputteringAnalytical chemistryAl (AZO) films [ZnO]02 engineering and technology7. Clean energy01 natural sciencesSputteringElectrical resistivity and conductivity0103 physical sciencesMaterials ChemistryTransmittance:NATURAL SCIENCES:Physics [Research Subject Categories]Thin filmPower density010302 applied physicsPulse durationHiPIMSSurfaces and InterfacesGeneral ChemistryPartial pressure021001 nanoscience & nanotechnologyCondensed Matter PhysicsSurfaces Coatings and FilmsSustained self-sputteringHigh-power impulse magnetron sputtering0210 nano-technologyRoom temperature depositionSurface and Coatings Technology
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