Search results for "Lithography"

showing 10 items of 242 documents

Single Photon Emission from Site-Controlled InAs Quantum Dots Grown on GaAs(001) Patterned Substrates

2009

5 páginas, 5 figuras.

Materials scienceFabricationbusiness.industryQuantum dotsQuantum point contactGeneral EngineeringPhysics::OpticsGeneral Physics and AstronomyCondensed Matter::Mesoscopic Systems and Quantum Hall EffectEpitaxySingle photon emissionCondensed Matter::Materials ScienceNanolithographyQuantum dotQuantum dot laserOptoelectronicsSingle photon emittersGeneral Materials SciencePatterned substratesbusinessQuantum
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All-organic electro-optic waveguide modulator comprising SU-8 and nonlinear optical polymer

2017

Institute of Solid State Physics, University of Latvia (SJZ/2016/26); Ministry of Education and Science, Republic of Latvia (MultIfunctional Materials and composItes, photonicS and nanotechnology (IMIS2)). We acknowledge Dr. Anatolijs Sarakovskis at Institute of Solid State Physics for the XPS measurements.

Materials scienceFabricationbusiness.industrySingle-mode optical fiberElectro-optic modulatorSecond-harmonic generation02 engineering and technology021001 nanoscience & nanotechnologyCladding (fiber optics)01 natural sciencesAtomic and Molecular Physics and Optics010309 opticsOpticsOptical modulatorModulation0103 physical sciences:NATURAL SCIENCES:Physics [Research Subject Categories]Optoelectronics0210 nano-technologybusinessMaskless lithographyOptics Express
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Well-aligned hydrothermally synthesized zinc oxide nanorods on p-GaN without a seed layer

2015

Zinc oxide nanorods have great potential for the realization of high efficiency heterostructure LEDs based on pdoped gallium nitride. In order to obtain a good confinement of the light, a well-aligned nanorod waveguiding structure is desirable. This paper reports on the fabrication of vertical zinc oxide nanorods using a solution-based growth process that does not require a seed layer. The nanorods obtained follow the crystalline growth direction of the GaN layer along the c-axis. Various results with different reagent concentrations are reported.

Materials scienceFabricationbusiness.industrychemistry.chemical_elementGallium nitrideHeterojunctionZincSettore ING-INF/01 - ElettronicaZinc oxide nanorods Nanofabrication Characterization p-GaN hydrothermal growth seed layerlaw.inventionchemistry.chemical_compoundNanolithographychemistrylawOptoelectronicsNanorodbusinessLayer (electronics)Light-emitting diode
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DNA-based biosensor on flexible nylon substrate by dip-pen lithography for topoisomerase detection

2019

Dip-pen lithography (DPL) technique has been employed to develop a new flexible biosensor realized on nylon with the aim to detect the activity of human topoisomerase. The sensor is constituted by an ordered array of a DNA substrate on flexible nylon supports that can be exploited as a drug screening platform for anticancer molecules. Here, we demonstrate a rapid protocol that permits to immobilize minute quantities of DNA oligonucleotides by DPL on nylon surfaces. Theoretical and experimental aspects have been investigated to successfully print DNA oligonucleotides by DPL on such a porous and irregular substrate.

Materials scienceFlexible deviceNanotechnologymacromolecular substances02 engineering and technologySubstrate (printing)01 natural sciencesIndustrial and Manufacturing Engineeringchemistry.chemical_compoundA-DNALithographyTopoisomerasebiologyOligonucleotideTopoisomerase010401 analytical chemistrytechnology industry and agriculture021001 nanoscience & nanotechnology0104 chemical sciencesSettore BIO/18 - GeneticachemistryMolecular printingbiology.protein0210 nano-technologyBiosensorDNABiosensor
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Better Actuation Through Chemistry: Using Surface Coatings to Create Uniform Director Fields in Nematic Liquid Crystal Elastomers.

2016

Controlling the molecular alignment of liquid crystal monomers (LCMs) within nano- and microstructures is essential in manipulating the actuation behavior of nematic liquid crystal elastomers (NLCEs). Here, we study how to induce uniformly vertical alignment of nematic LCMs within a micropillar array to maximize the macroscopic shape change using surface chemistry. Landau-de Gennes numerical modeling suggests that it is difficult to perfectly align LCMs vertically in every pore within a poly(dimethylsiloxane) (PDMS) mold with porous channels during soft lithography. In an untreated PDMS mold that provides homeotropic anchoring of LCMs, a radially escaped configuration of LCMs is observed. V…

Materials scienceHomeotropic alignmentAnchoringNanotechnology02 engineering and technology010402 general chemistry021001 nanoscience & nanotechnologyElastomerMethacrylate01 natural sciencesSoft lithography0104 chemical sciencesPlanarLiquid crystalNano-General Materials ScienceComposite material0210 nano-technologyACS applied materialsinterfaces
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Why are hydrogen ions best for MeV ion beam lithography?

2013

The exposure characteristics of poly-(methyl methacrylate) (PMMA) for 2MeV ^1H^+, 3MeV ^4He^2^+ and 6MeV ^1^2C^3^+ have been investigated. The samples were characterised using Atomic Force Microscopy (AFM), optical microscopy and Raman spectroscopy. Development was carried out using a 7:3 propan-2-ol:H"2O mixture to determine clearing and cross-linking fluences. It was found that protons had a considerably wider tolerance to exposure variations and a smaller span of doses within the ion track. Furthermore, the void formation and consequent stress-induced surface roughening were smaller for protons. For all ions, the C?C bond Raman signal increased continuously with dose and fluence, even we…

Materials scienceHydrogenta114Ion trackAnalytical chemistrychemistry.chemical_elementCondensed Matter PhysicsIon beam lithographyFluenceAtomic and Molecular Physics and OpticsSurfaces Coatings and FilmsElectronic Optical and Magnetic MaterialsIonlaw.inventionsymbols.namesakechemistry.chemical_compoundchemistryOptical microscopelawsymbolsElectrical and Electronic EngineeringMethyl methacrylateRaman spectroscopyta216ta116Microelectronic Engineering
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Resolution performance of programmable proximity aperture MeV ion beam lithography system

2007

AbstractAn ion beam lithography system for light and heavy ions has been developed at the University of Jyväskylä's Accelerator Laboratory. The system employs a programmable proximity aperture to define the beam. The proximity aperture is made up of four Ta blades with precise straight edges that cut the beam in the horizontal and vertical directions. The blade positions and dimensions are controlled by a pair of high-precision linear-motion positioners. The sample is mounted on a X-Y-Z stage capable of moving with 100 nm precision steps under computer control. The resolution performance of the system is primarily governed by the proximity aperture. Pattern edge sharpness is set by the beam…

Materials scienceIon beamAperturebusiness.industryAnalytical chemistryIon beam lithographyOpticsPhysics::Accelerator PhysicsRay tracing (graphics)X-ray lithographybusinessNext-generation lithographyBeam (structure)Beam divergence
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Editorial for the Special Issue on Nanofabrication with Focused Electron/Ion Beam Induced Processing

2021

Focused electron beam (FEB) and focused ion beam (FIB) technologies have opened novel paths for material science research and technology at the micro and nano scales in recent decades [...]

Materials scienceIon beamMechanical EngineeringNanotechnologyElectronFocused ion beamn/aEditorialNanolithographyScience researchControl and Systems EngineeringNano-TJ1-1570Cathode rayMechanical engineering and machineryElectrical and Electronic EngineeringMicromachines
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Programmable proximity aperture lithography with MeV ion beams

2008

A novel MeV ion beam programmable proximity aperture lithography system has been constructed at the Accelerator Laboratory of the University of Jyvaskyla, Finland. This facility can be used to fabricate three dimensional microstructures in thick (<100μm) polymer resist such as polymethylmethacrylate. In this method, MeV ion beams from the 1.7 MV pelletron and K130 cyclotron accelerators are collimated to a beam spot of rectangular shape. This shape is defined by a computer-controlled aperture made of a pair of L-shaped Ta blades which are in close proximity to the sample to minimize the penumbra broadening. Here the authors report on development of the system, the controlling software, the …

Materials scienceIon beambusiness.industryCondensed Matter PhysicsIon beam lithographyFocused ion beamPelletronOpticsPhysics::Accelerator PhysicsStencil lithographyX-ray lithographyElectrical and Electronic EngineeringbusinessNext-generation lithographyMaskless lithographyJournal of Vacuum Science &amp; Technology B: Microelectronics and Nanometer Structures
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Advanced time-stamped total data acquisition control front-end for MeV ion beam microscopy and proton beam writing

2013

Many ion-matter interactions exhibit [email protected] time dependences such as, fluorophore emission quenching and ion beam induced charge (IBIC). Conventional event-mode MeV ion microbeam data acquisition systems discard the time information. Here we describe a fast time-stamping data acquisition front-end based on the concurrent processing capabilities of a Field Programmable Gate Array (FPGA). The system is intended for MeV ion microscopy and MeV ion beam lithography. The speed of the system (>240,000 events s^-^1 for four analogue to digital converters (ADC)) is limited by the ADC throughput and data handling speed of the host computer.

Materials scienceIon beamta221Analytical chemistryHardware_PERFORMANCEANDRELIABILITYIon beam lithographyProton beam writingFront and back endsComputer Science::Hardware ArchitectureData acquisitionOpticsMicroscopyHardware_INTEGRATEDCIRCUITSElectrical and Electronic EngineeringField-programmable gate arrayHardware_REGISTER-TRANSFER-LEVELIMPLEMENTATIONta114business.industryta1182MicrobeamCondensed Matter PhysicsAtomic and Molecular Physics and OpticsSurfaces Coatings and FilmsElectronic Optical and Magnetic MaterialsPhysics::Accelerator PhysicsbusinessMicroelectronic Engineering
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