Search results for "sputtering"
showing 10 items of 136 documents
Growth of metal/oxide periodic multilayer : relation between structure and electrical behaviour in systems based on titanium and tungsten
2014
Periodic multilayers have found many applications in the fields of optics, mechanics or electronics. However, few studies focus on the electrical responses of the metal/oxide periodic structures versus temperature. The interest of this work was focused on the characterization of the multilayers and their electrical properties versus temperature. In TiO/Ti/TiO/TiO2 and WO/W/WO/WO3 systems produced by the reactive gas pulsing process, sample structures were established by transmission electron microscopy for sublayers thicknesses between 1.3 and 50.8 nm. Then, this study highlights a modification of conventional electrical behavior versus temperature. An empirical relationship was established…
High power impulse magnetron sputtering of Zn/Al target in an Ar and Ar/O2 atmosphere: The study of sputtering process and AZO films
2019
Financial support provided by Scientific Research Project for Students and Young Researchers Nr. SJZ/2017/4 realised at the Institute of Solid State Physics, University of Latvia is greatly acknowledged.
Evidence for a surface self-cleaning sputtering mechanism in fast atom bombardment mass spectrometry
1985
Evidence for a surface self-cleaning sputtering mechanism in fast atom bombardment mass spectrometry involving significant sputtering from the bulk of the glycerol matrix has been obtained from (a) the time dependence of sample ion abundances and chemical noise for bioorganic compounds, (b) determinations of the sputtering volume in glycerol solution, and (c) studies of in situ chemical and biochemical reactions. The relevance of these results for optimal sample/matrix preparation in analytical applications is pointed out.
Room-Temperature Micropillar Growth of Lithium-Titanate-Carbon Composite Structures by Self-Biased Direct Current Magnetron Sputtering for Lithium Io…
2019
Here, an unidentified type of micropillar growth is described at room temperature during conventional direct-current magnetron sputtering (DC-MS) deposition from a Li4Ti5O12+graphite sputter target under negative substrate bias and high operating pressure. These fabricated carbon-Li2O-TiO2 microstructures consisting of various Li4Ti5O12/Li2TiO3/LixTiO2 crystalline phases are demonstrated as an anode material in Li-ion microbatteries. The described micropillar fabrication method is a low-cost, substrate independent, single-step, room-temperature vacuum process utilizing a mature industrial complementary metal-oxide-semiconductor (CMOS)-compatible technology. Furthermore, tentative considerat…
Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF6 based plasmas
2012
The plasma etch characteristics of aluminum nitride (AlN) deposited by low-temperature, 200 °C, plasma enhanced atomic layer deposition (PEALD) was investigated for reactive ion etch (RIE) and inductively coupled plasma-reactive ion etch (ICP-RIE) systems using various mixtures of SF6 and O2 under different etch conditions. During RIE, the film exhibits good mask properties with etch rates below 10r nm/min. For ICP-RIE processes, the film exhibits exceptionally low etch rates in the subnanometer region with lower platen power. The AlN film’s removal occurred through physical mechanisms; consequently, rf power and chamber pressure were the most significant parameters in PEALD AlN film remova…
Porous structure of Purevision™ versus Focus® Night&Day™ and conventional hydrogel contact lenses
2002
The surface and bulk structures of hydrogel contact lenses that contain siloxane moieties, Purevision™ (balafilcon A) and Focus®Night&Day™ (lotrafilcon A), were investigated. Standard hydrogel lenses of low (Seequence®), medium (Acuvue®), and high water content (Precision UV®) were used as controls. All the lenses were dehydrated in a series of ethanol solutions of increased concentration, critical-point dried in CO2, and sputter coated with gold/palladium before they were examined by scanning electron microscopy. Of all lenses examined, only the balafilcon lenses presented, in addition to the polymer network porosity characteristic of all hydrogels, a macroporous structure that was observe…
Transversal thermovoltages of (1 1 9) Bi2Sr2CaCu2O8+δ thin films on vicinal (1 1 0) SrTiO3 substrates
1997
Abstract Biaxial textured (1 1 9) oriented Bi 2 Sr 2 CaCu 2 O 8+δ thin films were fabricated by DC-Magnetron sputtering on vicinal (1 1 0) SrTiO 3 substrates. The crystal orientation and stochiometry of the films were obtained from precise X-ray diffraction measurements in four-circle geometry. According to anisotropic transport measurements, the superconducting transition temperature is approximately 47 K and the normal state resistivities along two perpendicular paths differ by a factor of 13.5. Transversal thermoelectric effects were investigated by measuring thermovoltages transverse to temperature gradients parallel to the surface normal induced by pulsed laser irradiation. At room tem…
Vortex-creep activation energy in YBa2Cu3O7/PrBa2Cu3O7 superlattices
2010
Abstract YBa 2 Cu 3 O 7 /PrBa 2 Cu 3 O 7 (YBCO/PBCO) superlattices with a different ratio of the superconducting and insulating layer thicknesses were prepared by high pressure dc sputtering. The vortex-creep activation energy U 0 was determined by analyzing the in-plane resistive transition of 200 μm wide bridges with the external magnetic field B oriented along the c axis. It was found that U 0 is proportional to the thickness of the YBCO layers, and does only weakly depend on the PBCO layer thickness, when the latter exceeds two unit cells. We observed a change in the variation of U 0 with the current I in the specimen: U 0 exhibits a plateau in the low- I region, then decreases signific…
Mechanical behavior and limits to the microhardness testing of hard multilayer coatings on soft substrates
2000
Multilayer coatings of (Ti, Al) N x , (Ti, C)N x and (Nb, C)N x with bilayer thickness of 0.8-8 nm have been deposited by reactive sputtering on stainless steel substrates. Vickers microhardness measurements in the load range of 3.10 -3 to 1 N were performed using a self-adjusting tester. It has been shown that in order to obtain the true hardness of multilayer coatings on a softer substrate, the indentation depth should not exceed about 10% of the coating thickness. Indentation criteria for polycrystalline, amorphous and nanostructured multilayer coatings are compared. The obtained criterion for multilayer coatings is close to that for amorphous films.
Structural, electrical and optical properties of zinc‐iridium oxide thin films deposited by DC reactive magnetron sputtering
2014
ZnO-IrO2 thin films were deposited on glass by DC reactive magnetron sputtering at room tem-perature. Structural, electrical and optical properties were investigated as a function of iridium atomic concentra-tion in the films. XRD data shows that ZnO-IrO2 thin films are X-ray amorphous and Raman spectrum resembles the spectrum of IrO2, without any distinct features of wurtzite ZnO structure. The lowest film resistivity and the highest transmittance achieved in the present study were 1.4 × 10-3 Ωcm and 33% at 550 nm, respectively. However, resistivity and transmittance are inversely related to the iridium concentration in the films.