6533b857fe1ef96bd12b4f6b
RESEARCH PRODUCT
Monolithic integration of GMR sensors for standard CMOS-IC current sensing
A. De MarcellisPaulo P. FreitasCandid ReigJoana L. SantosSusana CardosoM.d. Cubells-beltranJordi Madrenassubject
EngineeringCmos asicHardware_PERFORMANCEANDRELIABILITY02 engineering and technologyIntegrated circuit01 natural scienceslaw.inventionApplication-specific integrated circuitlawHardware_INTEGRATEDCIRCUITSMaterials ChemistrySystem on a chipElectrical and Electronic Engineeringbusiness.industry010401 analytical chemistryElectrical engineering021001 nanoscience & nanotechnologyCondensed Matter Physics0104 chemical sciencesElectronic Optical and Magnetic MaterialsCMOSInterfacingCurrent (fluid)0210 nano-technologybusinessSensitivity (electronics)description
Abstract In this work we report on the development of Giant Magnetoresistive (GMR) sensors for off-line current measurements in standard integrated circuits. An ASIC has been specifically designed and fabricated in the well-known AMS-0.35 μm CMOS technology, including the electronic circuitry for sensor interfacing. It implements an oscillating circuit performing a voltage-to-frequency conversion. Subsequently, a fully CMOS-compatible low temperature post-process has been applied for depositing the GMR sensing devices in a full-bridge configuration onto the buried current straps. Sensitivity and resolution of these sensors have been investigated achieving experimental results that show a detection sensitivity of about 100 Hz/mA, with a resolution of about 5 μA.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2017-09-01 | Solid-State Electronics |